Semiconductor manufacturing uses FFKM seals in etch chambers exposed to fluorine plasmas and HF acids. O-rings prevent particle generation, maintaining wafer yields above 99%. Their ultra-low extractables comply with SEMI standards. In ALD tools, FFKM handles 400°C cycles without outgassing. Marco Rubber supplies custom FFKM for vacuum flanges. This purity extends tool uptime, crucial... https://globalsealstech.com/ffkm-seals/